| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical measuring device, capable of measuring defects and distortions in the inside of a measuring object, such as, a sapphire ingot using a single device. Ž<P>SOLUTION: The device comprises a scatterer observation part, including a single CCD camera 10, a laser light source 1, and a monochromatic light source 5 to observe a scatterer present within a measuring object 8, by having the measurement object irradiated with a laser light from the laser light source; and a distortion observation part for observing distortions present in the measuring object by irradiating the measuring object, with a monochromatic light from a monochromatic light source. A half-wave plate 2, a first galvano mirror 3 and a second galvano mirror 4 are disposed on the optical path between the laser light source and the measuring object, and a polarizer 6, the measuring object placed on a rotary table 7 and a displaceable optical analyzer 9 are disposed, in the order starting from the monochromatic light source side, on an optical path between the monochromatic light source and the CCD camera. Accordingly, the observation of scatterer resulting from a defect and observation of distortions within the measuring object can be performed in a short time, without the accompanying movement of the measurement object. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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