| 摘要 |
Disclosed is a method for measuring the similarity of two-dimensional images, at least one image exhibiting an additional signal, the location dependence or symmetry properties of which are known at least approximately. The images are partitioned into mutually identical subimages such that the extension of at least one subimage in the direction of the gradient of the additional signal is smaller than the extension of this subimage in the direction perpendicular thereto. The subimages are compared separately, and the results of all comparisons are combined to form the measurement result for similarity. As a result, the method becomes insensitive to variations in the additional signal. The method is particularly suited for the determination of defocusing and astigmatism of an electron-microscopic image. For this purpose, it is important to compare the similarity of an experimentally measured image to simulated images, which were generated using defined defocusing and astigmatism values.
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