发明名称 A method for making a glass supported system, such glass supported system, and the use of a glass support therefor
摘要 The invention relates to a method for making a glass supported micro or nano system, comprising the steps of: i) providing a glass support; ii) mounting at least one system on at least one glass support; and iii) bonding the system to the glass support, such that the system is circumferentially supported within the confinement of the glass support, to a glass supported system, and to the use of a glass support therefor.
申请公布号 EP2112130(A1) 申请公布日期 2009.10.28
申请号 EP20080007746 申请日期 2008.04.22
申请人 UNIVERSITEIT TWENTE;STICHTING VOOR DE TECHNISCHE WETENSCHAPPEN 发明人 UNNIKRISHNAN, SANDEEP;JANSEN, HENRICUS VENANTIUS;BERENSCHOT, JOHAN WILLEM;FAZAL, IMRAN;LOUWERSE, MARCUS CORNELIS;MOGULKOC, BERKER;SANDERS, REMCO;DE BOER, MEINT JELLE;ELWENSPOEK, MICHAEL CURT
分类号 C04B37/00;C04B37/04 主分类号 C04B37/00
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