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发明名称
摘要
申请公布号	JP4352271(B2)	申请公布日期	2009.10.28
申请号	JP20060161064	申请日期	2006.06.09
申请人		发明人
分类号	H01L21/8246;B81B3/00;G01R33/02;H01L27/10;H01L27/105;H01L29/84;H01L41/08;H01L41/187;H01L43/08	主分类号	H01L21/8246
代理机构		代理人
主权项
地址

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