Wafer carrying-in/out apparatus,申请号US20080322398F-传众专利搜索

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发明名称	Wafer carrying-in/out apparatus
摘要
申请公布号	USD602882(S1)	申请公布日期	2009.10.27
申请号	US20080322398F	申请日期	2008.08.04
申请人	TOKYO ELECTRON LIMITED	发明人	HOSAKA HIROKI;AKIYAMA SHUJI;OBIKANE TADASHI
分类号		主分类号
代理机构		代理人
主权项
地址

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