CAPACITOR WITH CRYSTALLIZATION AID LAYER AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A capacitor with crystallization aid layer and a method for manufacturing the same are provided to obtain the high dielectric constant and the low leakage current simultaneously by lowering the crystallization temperature. CONSTITUTION: A capacitor with crystallization aid layer is comprised of a bottom electrode(101), a crystallization helping layer(102) on the bottom electrode, the dielectric layer(103) formed on the crystallization helping layer, and an upper electrode(104) on the dielectric layer. The crystallization helping layer contains at least one element selected from zirconium, aluminum, hafnium and lanthanum.