发明名称 Method and Device for Removing Pollution From a Confined Environment
摘要 The subject of the present invention is a method for removing pollution from a confined environment containing an interior space bounded by a wall, involving the following steps: the confined environment which has a leak is placed in a sealed chamber comprising means of introducing a gas and means of pumping a gas the gas contained in the chamber and the gas contained inside the space are simultaneously pumped through the leak so that the pressure difference across the wall is always below a wall-damaging threshold. Another subject of the invention is a device for removing pollution from a confined environment comprising: a pollution removal chamber able to contain the confined environment, means of introducing a purging gas, means of pumping a gas with variable pumping capacity, means for controlling the pumping rate, means for monitoring the pressure difference between the inside and the outside of the environment. mechanical warping that would damage the wall of the unsealed enclosed environment.
申请公布号 US2009263216(A1) 申请公布日期 2009.10.22
申请号 US20070227587 申请日期 2007.05.24
申请人 FAVRE ARNAUD;BELLET BERTRAND;BERNARD ROLAND;METAIS XAVIER 发明人 FAVRE ARNAUD;BELLET BERTRAND;BERNARD ROLAND;METAIS XAVIER
分类号 H01L21/00;H01L21/673 主分类号 H01L21/00
代理机构 代理人
主权项
地址