发明名称 |
Laser apparatus, exposure head, exposure apparatus, and optical fiber connection method |
摘要 |
An optical fiber of a bundled fiber light source is an optical fiber whose core diameter is uniform but whose emission end cladding diameter is smaller than an incidence end cladding diameter thereof, and a light emission region thereof is made smaller. An angle of luminous flux from this higher luminance bundled fiber light source, which passes through a lens system and is incident on a DMD, is smaller, i.e., an illumination NA is made smaller. Thus, an angle of flux which is incident on a surface that is to be exposed is smaller. That is, a minute image formation beam can be obtained without increasing the image formation NA, focal depth is lengthen.
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申请公布号 |
US2005281506(A1) |
申请公布日期 |
2005.12.22 |
申请号 |
US20050195840 |
申请日期 |
2005.08.03 |
申请人 |
FUJI PHOTO FILM CO., LTD. |
发明人 |
OKAZAKI YOJI;ISHIKAWA HIROMI;NAGANO KAZUHIKO;FUJII TAKESHI;YAMAKAWA HIROMITSU |
分类号 |
G02B6/04;G02B6/08;G02B6/255;G02B6/26;G02B6/42;H01S3/067;H01S3/30;(IPC1-7):G02B6/26 |
主分类号 |
G02B6/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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