摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a spherical surface acoustic wave element that can always arrange cord electrodes with precision, with a predetermined gap therebetween with respect to a predetermined spherical surface acoustic wave peripheral circuit on the surface of the sphere of the piezoelectric crystal material. <P>SOLUTION: In the manufacturing method, a sphere 10 of a piezoelectric crystal material is moved to a predetermined support place 22a of a sphere support 22, in a sphere moving and supporting process for support at the predetermined support place. The relative position of a predetermined peripheral circuit 24 of the supported sphere to the support place is measured in a peripheral circuit relative position measurement process; a cord electrode 38 is formed on a cord electrode support 36 in a cord electrode forming process, based on the measured relative position. In the assembling process, the cord electrode support is fixed at a predetermined position of a spherical support, and the cord electrode is arranged at a predetermined relative position, while forming a predetermined gap with the peripheral circuit on a surface of the sphere at the predetermined support place of the spherical support. <P>COPYRIGHT: (C)2010,JPO&INPIT |