发明名称 MANUFACTURING METHOD OF SPHERICAL SURFACE ACOUSTIC WAVE ELEMENT
摘要 <P>PROBLEM TO BE SOLVED: To provide a manufacturing method of a spherical surface acoustic wave element that can always arrange cord electrodes with precision, with a predetermined gap therebetween with respect to a predetermined spherical surface acoustic wave peripheral circuit on the surface of the sphere of the piezoelectric crystal material. <P>SOLUTION: In the manufacturing method, a sphere 10 of a piezoelectric crystal material is moved to a predetermined support place 22a of a sphere support 22, in a sphere moving and supporting process for support at the predetermined support place. The relative position of a predetermined peripheral circuit 24 of the supported sphere to the support place is measured in a peripheral circuit relative position measurement process; a cord electrode 38 is formed on a cord electrode support 36 in a cord electrode forming process, based on the measured relative position. In the assembling process, the cord electrode support is fixed at a predetermined position of a spherical support, and the cord electrode is arranged at a predetermined relative position, while forming a predetermined gap with the peripheral circuit on a surface of the sphere at the predetermined support place of the spherical support. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009246771(A) 申请公布日期 2009.10.22
申请号 JP20080092309 申请日期 2008.03.31
申请人 TOPPAN PRINTING CO LTD 发明人 NAKASO NOBUTAKA
分类号 H03H3/08;H01L41/09;H01L41/18;H01L41/22;H01L41/29 主分类号 H03H3/08
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