发明名称 |
Mikro-Elektromechanische Struktur mit Selbstkompensation von durch thermomechanische Spannungen hervorgerufenen thermischen Driften |
摘要 |
In a micro-electromechanical structure (1; 30; 60; 70) of semiconductor material, a detection structure (19; 31) is formed by a stator (5; 35; 61) and by a rotor (4; 34), which are mobile with respect to one another in presence of an external stress and are subject to thermal stress; a compensation structure (24; 46) of a micro-electromechanical type, subject to thermal stress and invariant with respect to the external stress, is connected to the detection structure (19; 31) thereby the micro-electromechanical structure (1; 30; 60; 70) supplies an output signal (”C, V OUT ) correlated to the external stress and compensated in temperature. |
申请公布号 |
DE602004023082(D1) |
申请公布日期 |
2009.10.22 |
申请号 |
DE20046023082T |
申请日期 |
2004.09.22 |
申请人 |
STMICROELECTRONICS S.R.L., AGRATE BRIANZA |
发明人 |
MERASSI, ANGELO;ZERBINI, SARAH;VIGNA, BENEDETTO |
分类号 |
G01P15/125;G01P15/18 |
主分类号 |
G01P15/125 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|