发明名称 MULTI-DEGREE-OF-FREEDOM ACTUATOR AND STAGE DEVICE
摘要 Provided is a small-sized multi-degree-of-freedom actuator with large propulsive force, levitation force, and variable levitation force which enables a two-degree-of-freedom motion of a propulsion motion in an X-direction and a levitation motion in a Z-direction and a three-degree-of-freedom motion obtained by adding a driving motion in a ?Y-direction thereto. The multi-degree-of-freedom actuator is composed of a mover (110) provided with plural permanent magnets (114) and a stator (100) provided with a stator core (118) and plural coils. The permanent magnets (114) are arranged in the X-direction such that the number of poles P is an even number of two or more. The coils are composed of two types of coils: an X-direction driving coil (105) and a Z-direction driving coil (104). The Z-direction driving coils (104) the number of which is P are disposed at positions opposite to magnetic poles of the permanent magnets (114), and the X-direction driving coils (105) the number of which is P/2 are each disposed at a position opposite to an intermediate position between the magnetic poles of the permanent magnets (114).
申请公布号 WO2009128321(A1) 申请公布日期 2009.10.22
申请号 WO2009JP55406 申请日期 2009.03.19
申请人 KABUSHIKI KAISHA YASKAWA DENKI;TOYOTA, AKIHITO;SHIKAYAMA, TORU;KAKIHARA, MASANOBU;KONO, TOSHIYUKI;NAGAO, MITSUNORI 发明人 TOYOTA, AKIHITO;SHIKAYAMA, TORU;KAKIHARA, MASANOBU;KONO, TOSHIYUKI;NAGAO, MITSUNORI
分类号 H02K41/03;H01L21/677;H02K41/02 主分类号 H02K41/03
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