| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small acceleration sensor having stable electrical contact between wiring conductors and piezoresistance elements. <P>SOLUTION: This acceleration sensor includes a frame section having openings, weight sections arranged in the openings of the frame section, at least a pair of beam sections connecting the frame section and each weight section, detection sections formed on the beam sections and arranged respectively in regions where one-side ends of the beam sections are connected to the frame section, and in regions where the other ends of the beam sections are connected to the weight sections, joining sections formed at both ends of the detection sections, insulating layers formed on the beam sections and covering at least parts of the detection sections, at least one contact hole formed by opening an insulating layer in a formation region of each joining section, and wiring conductors for electrically connecting to the joining sections through those contact holes, and the width of the joining sections is larger than that of the detection sections. <P>COPYRIGHT: (C)2010,JPO&INPIT |
