| 发明名称 |
SYMMETRIC THERMOCENTRIC FLEXURE WITH MINIMAL YAW ERROR MOTION |
| 摘要 |
<p>A stamping structure for imprinting micro-sized features is provided. The stamping structure includes one or more optical flats. A flexure arrangement includes a plurality of beam flexures arranged in a symmetric configuration around the one or more optical flats so as to minimize the error yaw motion (?z) from thermal fluctuations associated with fixturing the one or more optical flats.</p> |
| 申请公布号 |
WO2009129441(A2) |
申请公布日期 |
2009.10.22 |
| 申请号 |
WO2009US40921 |
申请日期 |
2009.04.17 |
| 申请人 |
MASSACHUSETTS INSTITUTE OF TECHNOLOGY;SHILPIEKANDULA, VIJAY;YOUCEF-TOUMI, KAMAL |
发明人 |
SHILPIEKANDULA, VIJAY;YOUCEF-TOUMI, KAMAL |
| 分类号 |
B29C59/02;G03F7/20;H01L21/027 |
主分类号 |
B29C59/02 |
| 代理机构 |
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