APPARATUS FOR HEATING A SUBSTRATE AND METHOD FOR MANUFACTURING THE APPARATUS

摘要

PURPOSE: An apparatus for heating a substrate and a method for manufacturing the apparatus are provided to heat a substrate to high temperature with small power and reduce time for heating a substrate. CONSTITUTION: A substrate heating apparatus(100) includes a metal body(110) and a metal nitride layer(140). A heating body(120) is embedded in the metal body. The metal body supports a substrate(10). The metal nitride layer is on a surface of the metal body. Thickness of the metal nitride layer is equal to or thicker than thickness of areas except an area where substrates are placed.