| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing apparatus having a detecting device eliminating the necessity of setting adjusting operation such as sensitivity adjustment irrespective of the color of each substrate and highly accurately detecting even a transparent substrate. <P>SOLUTION: The substrate processing apparatus includes: a pedestal; a carrying device for directly carrying a printed board along a carrying path provided on the pedestal or indirectly carrying it via a plate-like substrate support; the detecting device for detecting the presence or absence of an object to be carried in the detection position set on the carrying path when defining the printed board and the substrate support as the object to be carried; and an executing section for executing predetermined processing such as printing of solder paste, application of an adhesive, mounting of electronic components and substrate inspection for the printed board carried to the working position on the pedestal by the carrying device. The detecting device includes: an ultrasonic sensor 30 for performing a transmission operation for transmitting ultrasonic waves and a receiving operation for receiving reflected waves of the ultrasonic waves, and a reflector RF paired with the ultrasonic sensor. <P>COPYRIGHT: (C)2010,JPO&INPIT |
