| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To simultaneously polarize a plurality of portions of a piezoelectric layer without generating a crack in the piezoelectric layer nor unnecessarily polarizing any other portions of the piezoelectric layer. <P>SOLUTION: The piezoelectric layers 41, 42 are laminated on the upper face of a vibration plate 40, and electrodes 43 to 45 are respectively disposed on the upper faces of the vibration plate 40 and the piezoelectric layers 41, 42. The electrode 43 is disposed so as to face a pressure chamber 10 and a trimmed pattern 43a is formed on the electrode 43 at a portion facing a roughly central portion of the pressure chamber 10. The electrode 44 has a facing portion 44a facing the trimmed pattern 43a and the facing portion 44a does not face the electrode 43. The electrode 45 faces the facing portion 44a at its roughly central portion and also faces the electrode 43 at a portion outside of the above portion. An active portion R1 is polarized upwardly in a direction of its thickness, and an active portion R2 is polarized downwardly in a direction of its thickness. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
