| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fan filter unit to be used in the conveyer in a clean room requiring a clean space which facilitates its attachment and attachment and removal of the dust removal filter, the chemical filter, etc. Ž<P>SOLUTION: The fan filter unit has a chamber 3 containing a fan 1, motor 2 and a dust removal filter 4 and a chemical filter 5 and an attachment and removal door 7 in the side surface of the chamber. The dust removal filter or the chemical filter is fixed to fixing protrusions 9 of the inside surface of the chamber and the attachment and removal door 7. The frame portion 10 for the filter has protrusions 11, holes 14 and an opening 12. The configuration allows attachment and removal of the dust removal filter 4 or the chemical filter 5 from the opening, reduces the time for attachment of the filters to the structure and replacement of the filters and prevents wrong attachment of the filters. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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