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发明名称
Polishing composition and polishing process
摘要
申请公布号
EP1894978(A3)
申请公布日期
2009.10.21
申请号
EP20070253000
申请日期
2007.07.31
申请人
FUJIMI INCORPORATED
发明人
KAWAMURA, ATSUNORI;HATTORI, MASAYUKI
分类号
C09G1/00;H01L21/321
主分类号
C09G1/00
代理机构
代理人
主权项
地址
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