MANUFACTURING METHOD OF NANO-STRUCTURE BY PRETREATMENT OF SUBSTRATE

摘要

PURPOSE: A manufacturing method for nano-structure with a process of substrate pre-treatment is provided to induce homeotropic alignment of GaN, thereby producing high quality nano-rods. CONSTITUTION: A manufacturing method for nano-structure with a process of substrate pre-treatment comprises the following steps of: placing a substrate(200) on a substrate holder(150) of a nano-structure producing machine; injecting inert gas into a reaction chamber of the nano-structure producing machine and maintaining the high temperature of the substrate; and removing impurities from the substrate with the inert gas and high temperature.