发明名称 Displacement detecting device
摘要 <p>A displacement detecting device includes a non-contact sensor (100A) having a light source (102), an objective lens (114) focusing output light from the light source (102) onto a measurement surface (TG), and a light receiving element (120) detecting displacement information based on a focal length of the objective lens (114) by using reflected light from the measurement surface (TG); a control unit (200) adjusting the focal length based on the displacement information; a displacement-amount measuring unit (400) having a linear scale (408) attached to the objective lens (114) with a link member (500) therebetween and measuring an amount of displacement of the linear scale (408) when the focal length is adjusted. A light adjustment member (130A) is disposed between the light source (102) and the objective lens (114) or between the objective lens (114) and the light receiving element (120) and has an aperture section transmitting the output and/or reflected light therethrough and a light blocking section that blocks a specific light component of the output and/or reflected light.</p>
申请公布号 EP2110640(A2) 申请公布日期 2009.10.21
申请号 EP20090156369 申请日期 2009.03.26
申请人 SONY CORPORATION 发明人 TAMIYA, HIDEAKI;TANIGUCHI, KAYOKO
分类号 G01B11/00;G01B11/02;G01B11/30;G01D5/38 主分类号 G01B11/00
代理机构 代理人
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