发明名称 ADHESIVE CHUCK DEVICE
摘要 A work is easily peeled off in the peeling direction by a peeling means. An adhesive member (2) is so disposed that the adhesive force per unit area of the adhesive member (2) is increased in the direction of peeling of a work (W) relative to the adhesive member (2) in connection with the operation of the peeling means (3), whereby peeling-off of the work (A) from the adhesive member (2) can be started by a small peeling force in connection with the operation of the peeling means (3), and the peeling can be smoothly advanced. When the work is peeled off in the direction different from the advancement direction of the peeling, a force far larger than the peeling force by the operation of the peeling means (3) is required.
申请公布号 KR20090109595(A) 申请公布日期 2009.10.21
申请号 KR20077018635 申请日期 2007.01.31
申请人 SHIN-ETSU ENGINEERING CO., LTD. 发明人 OHTANI YOSHIKAZU;YOKOTA MICHIYA
分类号 H01L21/683;B65G49/06;G02F1/13 主分类号 H01L21/683
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