发明名称 |
Air bearing assembly for guiding motion of optical components of a laser processing system |
摘要 |
A rigid support structure allows for faster and more accurate positioning of axially adjustable optical components in a laser processing system. Vibrational and thermal stability is improved when an optics assembly is housed in a rigid air bearing sleeve that is mounted to a support structure above a specimen stage.
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申请公布号 |
US7603785(B2) |
申请公布日期 |
2009.10.20 |
申请号 |
US20070676945 |
申请日期 |
2007.02.20 |
申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
KOSMOWSKI MARK T. |
分类号 |
G01B11/27 |
主分类号 |
G01B11/27 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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