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发明名称
Apparatus for fabricating mask of vertical deposition and Fabrication Method for making a mask of vertical deposition
摘要
申请公布号
KR100922045(B1)
申请公布日期
2009.10.19
申请号
KR20070118784
申请日期
2007.11.20
申请人
发明人
分类号
H01L21/027
主分类号
H01L21/027
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代理人
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