COMPOSITION FOR FORMING AN INORGANIC MATERIAL PATTERN AND METHOD FOR FORMING A PATTERN OF INORGANIC MATERIAL USING THE SAME

摘要

PURPOSE: A composition for forming inorganic pattern is provided to form inorganic pattern of nano or micro scale with low cost. CONSTITUTION: A composition for forming inorganic pattern comprises inorganic precursor, stabilizing agent, and solvent. The stabilizing agent is one or more selected fromβ-diketone andβ-keto ester. A method for producing reaction mixture solution (20) of inorganic precursor, stabilizing agent of inorganic precursor and solvent comprises: a step of patterning mixture solution by electrohydrodynamic lithography and a step of evaporating solvent to obtain inorganic pattern.