| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a temperature adjusting device for smoothly adjusting a temperature in shifting the temperature of a chamber to a temperature adjustment target value by aging. <P>SOLUTION: When the temperature of the chamber is shifted to a temperature control target value SP3 by aging control, a temperature change ratio is obtained by performing temperature adjustment by a V time while a target value SP close to the temperature adjustment target value SP3 by a shift value U, is set on the basis of the temperature of the chamber in starting the control. Then standard temperature adjustment control to keep the temperature change ratio is repeatedly performed when the temperature change ratio is within a reference value W. On the contrary, when the temperature change ratio is over expectation, the target value SP is set on the basis of a correction shift value X of a value smaller than the shift value U, and correction temperature adjustment control is repeatedly performed to create a temperature change ratio smaller than the temperature change ratio. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
