METHOD OF MANUFACTURING ALUMINUM NITRIDE-BASED MATERIAL

摘要

PROBLEM TO BE SOLVED: To provide a method of forming an aluminum oxide layer having high adhesive strength at high oxidation rate on the surface of an aluminum nitride-based sintered compact.

SOLUTION: The manufacturing method is provided with a heat treatment process for forming an aluminum oxide layer by heating aluminum nitride-based sintered compact at 1,000-1,500°C under a condition adjusted to an atmosphere of 0.0001-0.01 MPa oxygen partial pressure and ≥0.001 MPa water vapor partial pressure to oxidize the surface layer.

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