| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam irradiating apparatus capable of applying charged particle beam by both a wobbler method and a scanning method. SOLUTION: The charged particle beam irradiating apparatus 1 includes scanning electromagnets 3a and 3b that scan a charged particle beam R, a wobbler irradiation means 5 that applies the charged particle beam using a wobbler method, a scanning irradiation means 6 that applies the charged particle beam R using a scanning method, and a control unit 7 that controls the wobbler irradiation means 5 and the scanning irradiation means 6. In the charged particle beam irradiating apparatus 1, the control unit 7 operates one of the wobbler irradiation means 5 and the scanning irradiation means 6, and controls the other irradiation means to be in a withdrawn state so as not to hinder the application of the charged particle beam R. Thus, the irradiation by the wobbler method and the irradiation by the scanning method can be achieved without adverse effect of one of them on the other. COPYRIGHT: (C)2010,JPO&INPIT
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