METHODS STRUCTURES AND APPARATUS TO PROVIDE GROUP VIA AND IA MATERIALS FOR SOLAR CELL ABSORBER FORMATION

摘要

A process and apparatus which form a solar cell absorber on a surface of a workpiece as the workpiece and a capier are advanced through a rapid thermal processing (RTP) chamber. In one embodiment, the surface of the workpiece includes a precursor layer and an absorber constituent is disposed on the carrier, Initially an absorber constituent vapor can be formed in the RTP chamber by advancing the carrier into the RTP chamber to vaporize the absorber constituent from the carrier. The workpiece with the precursor layer is then moved into the RTP chamber to react the absorber constituent vapor and the precursor layer to form an absorber layer on the workpiece.