SPECTROSCOPIC OPTICAL SYSTEM, AND SPECTROMETRIC DEVICE

摘要

The use of a spectroscopic optical system that is arranged in a manner of the Schupmann optical system using a refractive/diffractive lens makes vertical epi-illumination available. The spectroscopic optical system can also correct a color having a wind band of DUV-UV (200nm to 400nm) range. The spectroscopic optical system includes a light source, a field diaphragm, a relay lens system, a field lens system, an imaging lens system, and a spectroscope. The relay lens system, the field lens system, and the imaging lens system are arranged in a manner of the Schupmann optical system using the refractive lens and/or the diffractive lens. In addition, in the spectroscopic optical system, the diffractive lens is included in either the relay lens system or the imaging lens system. The field lens system includes two or more lenses two of which are separated a predetermined distance from each other.