METHOD OF FORMING CONCAVE/CONVEX STRUCTURE AND SUBSTRATE WITH CONCAVE/CONVEX STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a convex structure or a concave structure having an anti-reflection structure without using high-precision, high-performance, and expensive devices and further without requiring refine and complicated processing steps.

SOLUTION: In the method of forming a concave structure on a substrate surface, spherical particles are disposed on a substrate, and a film made of a material different from that of the spherical particles is formed over the spherical particles, and the substrate is etched with the spherical particles and the film as an etching mask.

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