| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a holding jig which has advantage in handling property even if it is enlarged and prevents sticking of contamination without spoiling surface smoothness property when it is not used. <P>SOLUTION: The holding jig 1 includes an elastic member 5, which is formed in sheet shape, and a jig body 10, in which an embanked portion 12 surrounding the elastic member 5 is formed in a way that a recessed portion 11 capable of storing the elastic member 5 in a non-contact state may be formed. <P>COPYRIGHT: (C)2010,JPO&INPIT |
