发明名称 OPTICAL APERTURE DEVICE
摘要 <p>There is provided an optical module comprising an aperture device and a support structure supporting the aperture device, the aperture device defining an aperture edge and an aperture plane. The aperture edge is adapted to define a geometry of a light beam passing the aperture device along an optical axis. The support structure is adapted to hold the aperture device in a defined manner when the aperture plane is inclined with respect to a horizontal plane. A temperature distribution prevails within the aperture device and at least one of the aperture device and the support structure is adapted to maintain at least one of a relative position of the aperture edge with respect to the optical axis and a geometry of the aperture edge substantially unaltered upon an introduction of a thermal energy into the aperture device, the thermal energy being adapted to cause an alteration in the temperature distribution.</p>
申请公布号 WO2009124590(A1) 申请公布日期 2009.10.15
申请号 WO2008EP54311 申请日期 2008.04.09
申请人 CARL ZEISS SMT AG;BIEG, HERMANN;NGUYEN, UY-LIEM 发明人 BIEG, HERMANN;NGUYEN, UY-LIEM
分类号 G02B7/00;G02B5/00;G03F7/26;G03F9/00 主分类号 G02B7/00
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