发明名称 |
OPTICAL APERTURE DEVICE |
摘要 |
<p>There is provided an optical module comprising an aperture device and a support structure supporting the aperture device, the aperture device defining an aperture edge and an aperture plane. The aperture edge is adapted to define a geometry of a light beam passing the aperture device along an optical axis. The support structure is adapted to hold the aperture device in a defined manner when the aperture plane is inclined with respect to a horizontal plane. A temperature distribution prevails within the aperture device and at least one of the aperture device and the support structure is adapted to maintain at least one of a relative position of the aperture edge with respect to the optical axis and a geometry of the aperture edge substantially unaltered upon an introduction of a thermal energy into the aperture device, the thermal energy being adapted to cause an alteration in the temperature distribution.</p> |
申请公布号 |
WO2009124590(A1) |
申请公布日期 |
2009.10.15 |
申请号 |
WO2008EP54311 |
申请日期 |
2008.04.09 |
申请人 |
CARL ZEISS SMT AG;BIEG, HERMANN;NGUYEN, UY-LIEM |
发明人 |
BIEG, HERMANN;NGUYEN, UY-LIEM |
分类号 |
G02B7/00;G02B5/00;G03F7/26;G03F9/00 |
主分类号 |
G02B7/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|