发明名称 METHOD AND APPARATUS TO REMOVE AND REPLACE FACTORY INTERFACE TRACK
摘要 A method and apparatus for removing and replacing an existing component with an upgraded component disposed in an enclosure is described. The method includes removing a first portion of the component and mounting a tool capable of movement in four degrees of freedom on a surface of the enclosure. The tool is attached to a second portion of the component and the second portion of the component is removed from the enclosure. A replacement component, having a first and second portion, is installed inside the enclosure. Embodiments further provide a lifting apparatus having at least one support brace detachably coupled to opposing sides of an enclosure attached to a processing tool. The upper support beam is slidably coupled with the support brace and a lower support beam is rotatably and slidably coupled with the upper support beam.
申请公布号 US2009255892(A1) 申请公布日期 2009.10.15
申请号 US20090399474 申请日期 2009.03.06
申请人 APPLIED MATERIALS, INC. 发明人 COLLINS KIERAN NOEL;BORDEN ADRIAN L.
分类号 B66C19/00;B23P6/00 主分类号 B66C19/00
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