NOVEL MICROPORES AND METHODS OF MAKING AND USING THEREOF
摘要
Disclosed herein are methods of making micropores of a desired height and/or width between two isotropic wet etched features in a substrate which comprises single-level isotropic wet etching the two features using an etchant and a mask distance that is less than 2X a set etch depth. Also disclosed herein are methods using the micropores and microfluidic devices comprising the micropores.
申请公布号
WO2009126352(A2)
申请公布日期
2009.10.15
申请号
WO2009US31516
申请日期
2009.01.21
申请人
SANDIA NATIONAL LABORATORIES;PERROUD, THOMAS, D.;PATEL, KAMLESH, D.;MEAGHER, ROBERT, J.
发明人
PERROUD, THOMAS, D.;PATEL, KAMLESH, D.;MEAGHER, ROBERT, J.