发明名称 DEPOSITION METHOD AND METHOD OF MANUFACTURING LIGHT-EMITTING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a deposition method in which a loss of materials is reduced to achieve a utilization efficiency and a thin film of fine patterns can be formed on a deposition substrate, to provide a light-emitting element formed using the deposition method and to provide a method of manufacturing a high definition light-emitting device at a low cost. SOLUTION: A material contained in a material layer is deposited selectively on the deposition substrate which is arranged to face the material layer, by irradiating light on a light absorbing layer after transmitting the substrate on a deposition substrate in which the light absorbing layer and the material layer are formed on a substrate. By forming selectively the light absorbing layer, a film deposited on the deposition substrate can get selectively a deposition of fine patterns reflecting patterns of the light absorbing layer. For formation of the material layer, powder containing an organic compound material is dispersed on the substrate and the light absorbing layer and is solidified by a heat treatment. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009238740(A) 申请公布日期 2009.10.15
申请号 JP20090037410 申请日期 2009.02.20
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 YAMAZAKI SHUNPEI
分类号 H05B33/10;C23C14/04;H01L51/50 主分类号 H05B33/10
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