发明名称 FILM FOR SEMICONDUCTOR, METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE, AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a film for a semiconductor which does not require a flux cleansing process, offers superior productivity, and improves workability in processing a semiconductor wafer. SOLUTION: The film for the semiconductor is the laminated film consisting of a back grind tape and an adhesive layer. The adhesive layer is made of a resin composition containing a resin capable of bridging and a compound having flux activity. A method for manufacturing a semiconductor device includes: a step for bonding the adhesive layer of the film for the semiconductor to a functional surface of a semiconductor wafer having preformed solder bumps; a step for grinding the surface opposite to the functional surface; a step for dividing the semiconductor wafer into individual pieces to obtain a semiconductor element; and a step for peeling the semiconductor element between the back grind tape and the adhesive layer of the film for the semiconductor and picking the semiconductor element to mount it on a substrate. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009239138(A) 申请公布日期 2009.10.15
申请号 JP20080085439 申请日期 2008.03.28
申请人 SUMITOMO BAKELITE CO LTD 发明人 HIRANO TAKASHI
分类号 H01L21/301;C09J7/02;C09J11/06;C09J201/00;H01L21/304;H01L21/60 主分类号 H01L21/301
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