| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily remove a mask held by a mask holding means from the mask holding means in a short time. <P>SOLUTION: A first groove (outer groove) 4a for attracting and holding a peripheral part of a mask 3 is formed at a peripheral part of a mask holding means 4 formed of a transparent material, and a second groove (inner groove) 4b for attracting and holding the center of the mask 3 is formed inside the first groove, and the second groove 4b is formed inward from breaks of the first groove 4a. A vacuum supply hole 4c of the first groove 4a and a vacuum supply hole 4d of the second groove 4b are connected to a vacuum source and an air source so that connection can be switched by three-way valves 9a and 9b. When the mask 3 is removed from the mask holding means 4, vacuum supply to the second groove 4b is switched to air supply while supplying a vacuum to the first groove 4a, and furthermore, vacuum supply to the first groove 4a is switched to air supply when necessary. <P>COPYRIGHT: (C)2010,JPO&INPIT |
