| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shower plate capable of suppressing the amount of formation of reaction products with the shower plate when performing treatment using a corrosive gas. Ž<P>SOLUTION: The shower plate 100 has such a composition that an anodized aluminum film 110 is formed on the surface of an aluminum plate 102. The anodized aluminum film 110 has not a porous layer where micro pores are formed and has a film thickness of 0.3 μm or less. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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