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摘要
申请公布号
JP4345410(B2)
申请公布日期
2009.10.14
申请号
JP20030306745
申请日期
2003.08.29
申请人
发明人
分类号
H01L21/31;H01L21/316;H01L21/44
主分类号
H01L21/31
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代理人
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