| 摘要 |
PURPOSE: A planar pulse motor, an exposure apparatus and a method for manufacturing a device are provided to supply a current to coils of all magnetic field generators. CONSTITUTION: A planar pulse motor includes a movable element(4) and a stator(12). The movable element includes a magnetic material. The mover includes a plurality of convex parts in the substrate facing the stator. The stator includes a plurality of magnetic field generators(6a,6b) for driving the movable element. The stator includes a yoke and a coil. The yoke has a plurality of comb teeth. A coil excites the yoke. The planar pulse motor includes a controller. The controller controls the rotation of the movable element by operating the magnetic field generators which do not include the region except for the region facing the movable element and a central line of the movable element along the driving direction.
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