发明名称 |
Fiber laser based production of laser drilled microvias for multi-layer drilling, dicing, trimming of milling applications |
摘要 |
Fiber lasers and methods for constructing and using fiber lasers for micro-/nano-machining with output beams including stacked pulses and combinations of continuous wave, pseudo-continuous wave and pulse sequence components.
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申请公布号 |
US7602822(B2) |
申请公布日期 |
2009.10.13 |
申请号 |
US20050237527 |
申请日期 |
2005.09.28 |
申请人 |
HITACHI VIA MECHANICS, LTD |
发明人 |
LIZOTTE TODD E;OHAR OREST |
分类号 |
H01S3/30 |
主分类号 |
H01S3/30 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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