发明名称 Fiber laser based production of laser drilled microvias for multi-layer drilling, dicing, trimming of milling applications
摘要 Fiber lasers and methods for constructing and using fiber lasers for micro-/nano-machining with output beams including stacked pulses and combinations of continuous wave, pseudo-continuous wave and pulse sequence components.
申请公布号 US7602822(B2) 申请公布日期 2009.10.13
申请号 US20050237527 申请日期 2005.09.28
申请人 HITACHI VIA MECHANICS, LTD 发明人 LIZOTTE TODD E;OHAR OREST
分类号 H01S3/30 主分类号 H01S3/30
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