发明名称 MOS transistor and method for producing a MOS transistor structure
摘要 A MOS transistor, and a method for producing the same, is provided with a source region, a gate-region, a drain region, and a drift region in an SOI wafer. The SOI-wafer has a carrier layer, which carries an insulating intermediate layer, and whereby the insulating intermediate layer carries an active semiconductor layer, in which laterally different doping material concentrations define the source region, the drift region, and the drain region. Whereby, the active semiconductor layer, at least in a portion of the drift region, is thicker than in the source region. The MOS transistor is characterized in that the active semiconductor layer, in a vertical direction, is completely separated by the insulating intermediate layer from the carrier layer.
申请公布号 US7601568(B2) 申请公布日期 2009.10.13
申请号 US20070727871 申请日期 2007.03.28
申请人 ATMEL GERMANY GMBH 发明人 DUDEK VOLKER
分类号 H01L21/00;H01L21/336;H01L21/786;H01L21/84;H01L27/12;H01L29/08;H01L29/423;H01L29/78;H01L29/786 主分类号 H01L21/00
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