PHASE CHANGE MEMORY DEVICE

摘要

PURPOSE: A phase change memory device is provided to improve data retention by making a contact region small and reducing power consumption. CONSTITUTION: A phase change memory device is composed of a first electrode, a second electrode, a phase change material pattern(45), and a phase change assistant pattern(65). The phase change material pattern is interposed between the first electrode and the second electrodes, and the phase change assistant pattern contacts with a single-side of the phase change material pattern at least. The phase change assistant pattern includes a compound such as a chemical formula DaMb[GxTy]c: the formula is satisfied 0<=a /(a+b+c) <=0.20<=b /(a+b+c) <=0.10.3<=x /(x+y) <=0.7.