发明名称 |
Method of classifying defects using multiple inspection machines |
摘要 |
The present invention provides a method of classifying defects wherein defects are detected in a first inspection machine. The detected defects are then reviewed by a second inspection machine. A sampling rate for review by the second inspection machine is determined by a defect classifier in the first inspection machine.
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申请公布号 |
US7602962(B2) |
申请公布日期 |
2009.10.13 |
申请号 |
US20040762091 |
申请日期 |
2004.01.20 |
申请人 |
HITACHI HIGH-TECHNOLOGIES CORPORATION |
发明人 |
MIYAMOTO ATSUSHI;OKUDA HIROHITO;HONDA TOSHIFUMI;TAKAGI YUJI;HIROI TAKASHI |
分类号 |
G06K9/00;G06K9/62;G06T7/00 |
主分类号 |
G06K9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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