发明名称 |
Device consisting of at least one optical element |
摘要 |
An optical assembly comprises at least one optical element movable in at least two degrees of freedom and at least one actuator for adjusting the least one optical element; at least one sensor for sensing the position of the at least one element in at least two degrees of freedom and is characterized in that the at least one sensor is located at least substantially diagonally opposite to the least one actuator.
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申请公布号 |
US7603010(B2) |
申请公布日期 |
2009.10.13 |
申请号 |
US20060509154 |
申请日期 |
2006.08.24 |
申请人 |
CARL ZEISS SMT AG |
发明人 |
KWAN YIM-BUN PATRICK;MUEHLBEYER MICHAEL;LIPPERT JOHANNES |
分类号 |
G02B6/26;G02B7/00;G02B7/02;G02B7/182;G03F7/20 |
主分类号 |
G02B6/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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