| 摘要 |
<p>Provided are a plasma generating device and a method for generating plasma in a long, narrow tube by electrodeless discharge and plasma treating of the interior of the long, narrow tube. The plasma generating device has a container (1) that can house a long, narrow tube (9), as well as adjust the internal pressure, a magnetic field application means (8) for applying a magnetic field to at least a portion of said long, narrow tube, and a microwave-supplying means (2) that injects microwaves into said container. Plasma is generated in said long, narrow tube by injection of microwaves into said container with the pressure inside said long, narrow tube adjusted to a prescribed pressure above the pressure in said container and with a magnetic field applied to at least a portion of said long, narrow tube.</p> |
