| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a locking structure for improving convenience in assembling and disassembling a mask of a semiconductor manufacturing process or the like with a shell and the locking structure through an attaching hole on the shell in an arranging device. <P>SOLUTION: The locking structure of a mask arranging device includes the shell 2, at least one locking part 3 pivotally supported in the inside of the shell 2, at least one locking plate 4 connected on the bottom part of the locking part 3, and at least one screw 5. The shell 2 includes at least one attaching hole 21. The attaching hole 21 penetrates the inside from the upper face of the shell 2, and the screw 5 penetrates the attaching hole 21 and the locking part 3 in order to screw the locking plate 4. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
