| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a surface inspection device capable of certainly detecting a patternwise spills not having marked unevenness like a surface crack and turnover or turnup in a surface to be inspected, developing high flaw detection precision, and being sufficiently incorporated even in a product quality inspection line, and a surface inspection method. Ž<P>SOLUTION: The surface inspection device is equipped with a flaw candidate extraction part for applying image processing including binarization to the image signals outputted from three cameras to extract a flaw candidate point, a feature quantity calculation part for extracting feature quantity with respect to a flaw candidate, a camera-to-camera feature quantity corresponding part for performing the correspondence of feature quantity judged to be caused by the same flaw with respect to the feature quantity extracted from three cameras, a secondary feature quantity calculation part for calculating secondary feature quantity from the feature quantities of the respective cameras, and a flaw kind/harmless pattern judging part for judging a flaw kind or a harmless pattern from the secondary feature quantity. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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