摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor element which scarcely cracks and chips, and a manufacturing method of the sensor element. <P>SOLUTION: In cutting the laminate to cut out a plurality of element bodies to be baked to make the sensor elements 101, the cutting is carried out preferentially in the state wherein the difference in resistance applied to both sides of the edge of a cutting means is smallest. Namely, the equal cutting, which is a cutting in the state that the resistances applied to both sides of the edge of the cutting means are almost the same, is preferentially conducted. When the equal cutting is impossible, the unequal cutting, which is a cutting in the state that the resistances applied to both sides of the edge of the cutting means are different, is conducted. By this, the outer shape of the sensor elements seen by seeing the face vertical to the longitudinal direction has a trapezoid having four corners A, B, C, D, wherein a side AD and a side BC are almost in parallel with each other, the corner B and corner C on a side equipped with a heater do not have an acute angle, and the corner A and corner B on the other side do not have an obtuse angle. <P>COPYRIGHT: (C)2010,JPO&INPIT |