发明名称 CUTTING DEVICE AND CHIP MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To prevent a cutting liquid dispersed during cut work from sticking to a light-emitting section and a light-receiving section of a cutting blade detector, and to make the cutting blade detector always exactly detect a position and the state of a cutting blade. SOLUTION: A cutting device includes: a cutting means 2 provided with a rotatable cutting blade 22 which carries out the cutting processing of a work W; and a cutting blade detecting means 3 which has a light-emitting section 30 and a light-receiving section 31 and detects the cutting blade 22. The cutting blade detecting means 3 is provided with: an air supply nozzle 37 which supplies air to the light-emitting section 30 and the light-receiving section 31; a liquid discharge means 36 for discharging water; and submergence forming means 33 which submerges the light-emitting section 30 and the light-receiving section 31 by the discharged water, and the cutting blade detecting means prevents the cutting liquid and cutting wastes from sticking by submerging the light-emitting section 30 and the light-receiving section 31. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009231555(A) 申请公布日期 2009.10.08
申请号 JP20080075484 申请日期 2008.03.24
申请人 DISCO ABRASIVE SYST LTD 发明人 UEMURA SHINICHIRO
分类号 H01L21/301;B24B55/00 主分类号 H01L21/301
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